Sensors
Chemically Resistant Capacitive Sensors
•
Cylindrical sensors
for IPA and chemical level control.
Photoelectric Sensors
•
Photoelectric Sensors
for detection of wafer and wafer cartridges.
Optical Sensors
•
For leak and level detection.
Key Interlock and Door Switches
•
For machinery and operator protection.
Switching Products
Solid State Relays
•
Zero switching types
for heater and quartz lamp control.
•
Analog switching solid state relays
for proportional switching of quartz heaters.
Mechanical Switching Devices
•
Contactors and Relays
for electromechanical switching of loads.
•
Pushbuttons, Selector Switches
and indicator lights meeting SEMI S2 for
human/machine interfaces.
•
Rotary disconnects and cam switches
for secure powering up/down
of machinery.
Control and Monitoring
Process Controllers
•
Single Loop Controllers
for temperature and chemical process control.
Current and Voltage Monitors
•
Voltage Monitors
in accordance with SEMI S47 for monitoring voltage sags
and poorly regulated voltages
Enclosures
•
Stainless Steel Enclosures
to safely house electronic components.
